si deposition question

Hi all,

I have two short questions. I am trying to deposit 80nm si on Au.

 

1.       When depositing si in innotec, what’s the ballpark power that it will evaporate (the log book doesn’t have much si deposition)

 

2.       What recipe have you tried for si removal. According to the snf website, drytek1 will do the job….

 

 

I tried 80nm sio2 using sts but I get grainy clusters. My goal is to get 80nm of si or sio2 or SiNx , on Au with relatively okay uniformity and be able to remove this successfully.

 

 

Thank you!

 

Best Regards,

Sonny

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"What makes the desert beautiful," said the Little Prince ,"is that somewhere it hides a well ."

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Sonny Vo

Department of Applied Physics, Stanford University

(626) 202-8379

Harris Research Group: http://snow.stanford.edu/index.html