skip to main
|
skip to sidebar
P5000 Email Log
Tuesday, August 25, 2009
Comment p5000etch SNF 2009-08-25 15:13:32: Update
Unable to start-up the system. Unable to turn on Ch.A and Ch. B pumps. Also cant turn on the heat exchangers. Will call field service tomorrow.
No comments:
Post a Comment
Newer Post
Older Post
Home
View mobile version
Subscribe to:
Post Comments (Atom)
Problem Categories
vacuum pump
Ch.C
handling
rf power
Ch. A
load lock
Blog Archive
►
2013
(60)
►
February
(23)
►
January
(37)
►
2012
(802)
►
December
(55)
►
November
(78)
►
October
(58)
►
September
(49)
►
August
(98)
►
July
(44)
►
June
(70)
►
May
(75)
►
April
(84)
►
March
(97)
►
February
(74)
►
January
(20)
►
2011
(810)
►
December
(77)
►
November
(74)
►
October
(105)
►
September
(30)
►
August
(82)
►
July
(36)
►
June
(35)
►
May
(100)
►
April
(52)
►
March
(75)
►
February
(82)
►
January
(62)
►
2010
(900)
►
December
(38)
►
November
(48)
►
October
(58)
►
September
(88)
►
August
(53)
►
July
(83)
►
June
(69)
►
May
(108)
►
April
(111)
►
March
(100)
►
February
(96)
►
January
(48)
▼
2009
(843)
►
December
(71)
►
November
(110)
►
October
(77)
►
September
(56)
▼
August
(43)
Announcement for changes in SNF for a new fiscal year
REMINDER: Chen Fang Ph.D. Dissertation Defense Tod...
Problem p5000etch SNF 2009-08-29 23:53:54: issues ...
Problem p5000etch SNF 2009-08-28 12:17:45: BCl3 fl...
SNF is again open following the power outage ....
amorphous silicon depositon - outsourcing
Ph.D. Defense announcement: Chen Fang (Monday Augu...
Re: Comment p5000etch SNF 2009-08-25 15:13:32: Update
Re: Shutdown p5000etch SNF 2009-08-24 15:19:05: Co...
RTA question
Comment p5000etch SNF 2009-08-25 15:13:32: Update
Thesis Defense - Li Zhang
Shutdown p5000etch SNF 2009-08-24 15:19:05: Comput...
Process Clinic Today (Monday, 8/24) 2 pm
International Winter School for Graduates
looking for holder for one-side liquid etching fro...
REMINDER: Jeremy Rowlette PhD dissertation defense...
Molecular Foundry Presentation
Molecular Foundry Presentation
PhD dissertation defense : Hyun-Yong Yu
Reminder: PhD dissertation defense today
PhD dissertation defense: Jeremy A. Rowlette
Looking for missing reticle
2009-10 Department Sponsorship Apps Available
Re: DLTS and Hall measurement
DLTS and Hall measurement
Does anyone have SU8-2075?
Re: Reminder: PhD defense - Irene Goldthorpe
Reminder: PhD defense - Irene Goldthorpe
Molecular Foundry Presentation
University PhD Dissertation Defense for Jonathan A...
si deposition question
Re: Comment p5000etch SNF 2009-08-07 08:58:08: Ch....
Updated Java Runtime Environment for Remote Coral ...
Comment p5000etch SNF 2009-08-07 08:58:08: Ch.A is...
PhD Defense: Irene Goldthorpe
Re: Comment p5000etch SNF 2009-08-05 02:09:49: add...
Re: Shutdown p5000etch SNF 2009-08-05 01:53:05: wa...
Comment p5000etch SNF 2009-08-05 02:09:49: additio...
Shutdown p5000etch SNF 2009-08-05 01:53:05: wafer ...
Nitride paterning with wet etch?
wafer bonding/fusion
missing wafers!
►
July
(73)
►
June
(85)
►
May
(70)
►
April
(54)
►
March
(48)
►
February
(90)
►
January
(66)
►
2008
(1009)
►
December
(33)
►
November
(60)
►
October
(101)
►
September
(126)
►
August
(57)
►
July
(98)
►
June
(80)
►
May
(134)
►
April
(89)
►
March
(79)
►
February
(101)
►
January
(51)
►
2007
(89)
►
December
(49)
►
November
(29)
►
October
(11)
No comments:
Post a Comment