Monday, September 15, 2008
Re: Problem p5000etch SNF 2008-09-14 15:52:39: errors
Analog signals were not updating on the screen. Reset the system and restarted all the chambers. Ran 4 wafers through both Ch.A and Ch.B. System faulted for I/O blocked during the unload. Adjusted the cassette elevator height. System ran OK after the adjustment.
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