Thursday, September 13, 2012

Re: Problem p5000etch SNF 2012-09-12 12:35:58: Cassette is warped

Changed the blue cassette to a white teflon cassette.
Leveled both A and B cassette platform, changed
bottom slot offset and slot spacing . Cycled wafers
on slot's 1,2,10,11,24 and 25 from cassette elevator
to the storage elevator..

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