Wednesday, September 12, 2012

Problem p5000etch SNF 2012-09-12 16:24:42: broken wafer

Wafer went into chamber B whole. When I unloaded it, there was a large 5mm wide piece of the wafer missing (near the edge). I don't see the piece of wafer so it could be in the loading robotics or it could still be in Chamber B.

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