Thursday, March 29, 2012

Re: Problem p5000etch SNF 2012-03-15 10:17:50: Ch.C is down

Was able to make the pneumatic cylinder work after reversing the direction of the air metering valves. The metering valves now restricts the incoming air and have the exhaust air at full flow instead of the other way.
Ran 16 wafers through Ch.C with no problems.

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