Comment p5000etch SNF 2012-03-29 17:28:45: Qual for CH.C results

I ran the recipe CH.C POLY ETCH.
Poly ER = 2920A/min
PR ER = 603A/min
Single Crystal Si ER = 2404A/min
Thermal Ox ER = 306A/min
Poly : PR = 4.8 : 1
Poly : Ox = 9.5 : 1
Poly : Single Cr Si = 1.2 : 1