Just following up on the reported smell in the fab. At about 1:30 PM, did a thorough investigation of the Litho area for spill and leaks in and around all tools. Also checked all hazardous waste and regular waste cans- All OK. All tool and wet bench exhausts working fine. Could not find any obvious reason for the odor. I noticed when I got here that there was a solvent type odor outside of the building. I could also smell it in the main hallway and the change room and in litho but to a lesser degree. 2 other users also smelled something outside. Possibly something going on at the Cogen plant and getting pulled in by our air handlers. Left for a while and returned and checked the Litho area out between 4 and 4:30 PM. Could not detect any more odor. Suspect that the source of the smell was coming from outside. Please continue to be aware of and report any unusual odors in the lab. If there is a re-occurrence of the odor, please do not hesitate to call the SNF Staff cell phone at 650-521-7306 and leave the area if necessary as a health and safety precaution.
Thanks... Your SNF Staff
----- Original Message -----
From: "J Provine" <jprovine@stanford.edu>
To: labmembers@snf.stanford.edu
Sent: Saturday, May 7, 2011 9:28:09 AM
Subject: Smell in the fab
A strong smell of photoresist (mixed with a bit of a developer smell
also) is permeating the lab. It is strong in the litho area but
detectable in the white area and the gowning room as well.
Please be aware. Current fab users can not trace the source of the smell.
Signs will be posted at the litho entrance doors to warn of the smell
and the staff phone was called and they will investigate further as
soon as possible.
J
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