Problem p5000etch SNF 2011-05-02 15:27:40: Chamber A MFCs and Turbo

The turbo for chamber A was on. I tried to run the Ch A Metal recipe but the gas flow couldn't stabilize (the value varied widely from -100 to 100 sccm). It then overpressured and stopped the process. I tried it again and it just alarms with an overpressure error. Now, the turbo saws it is off.