Happy new year and welcome back! The lab is now officially open. It was a busy shutdown with a lot of activity: make sure to check Coral for tool status before committing your wafers. Update summaries are posted or forthcoming:
Furnaces (http://snf.stanford.edu/cgi-bin/ezmlm-cgi/2130)
Metals/RTP (http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:4384:201101:ighileapbfhbpbaibjdj)
Etch (http://toolstatus.blogspot.com/)
Litho (http://snf.stanford.edu/cgi-bin/ezmlm-cgi/2100)
Some tools still require qual testing and there are still some cleanup tasks to be finished -- your help would be appreciated!
Please be reminded of the lab and CAD room cleanups: All Items that were not labeled or properly stored in bins were removed. All these items which are not claimed by March 1 will be disposed of or recycled.
As for the shutdown, here's a summary of just some of the activities:
1. Major PM to building substations. This required shutdown of power to both Allen buildings. Breakers were cleaned and checked. We'd been running at near capacity on one unit, but are now back to running on both. Facilities and EH&S worked to decontaminate/cleanup/repair an old leak. They did a great job of coordinating with each other and our staff to minimize downtime and brought things back up hours ahead of schedule. (However... despite the maintenance staff coming in to perform power down/power up before/after the substation PM, some of the lab tools did not take to the power shutdown very well -- a reminder to check Coral for current status.)
2. Annual TGO inspection/testing. This is done under the supervision of the County -- and it would appear that this was the cleanest inspection from the County ever (congratulations to the TGO effort led by Ted & Leonard.)
3. Solvent exhaust work. Facilities replaced the fan to boost the lab solvent exhaust. Team Litho spent many days to baseline the coat tools before the exhaust upgrade and are working to bring them back to qual standards (check Coral). This, by the way, is an important project for litho because for the first time in years, the litho area is not solvent exhaust limited -- insufficient exhaust has prevented installation of the second coat track and limited performance of the EV Spraycoat and KS Coater tools. With the upgrade, Team Litho should be able to make great progress on these projects.
4. Lab equipment. The maintenance crew continued working on equipment installations, repairs, and preventive maintenance. The process group decontaminated wet benches (thanks Uli!), scrubbed work surfaces, and started in on quals. As issues on some of these tools persist, check Coral for current status.
If you have any questions, contact staff.
Happy processing!!!
Your SNF Staff
-- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang@stanford.edu http://snf.stanford.edu
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