Pd etching rate

Dear All,

Does anyone know about the etching of Pd on Si? What kind of chemical is used and what is the approximate etching rate?

Many thanks!

Sincererly yours,

Liangliang Zhang
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Ph.D. Candidate
School of Electrical Engineering
Stanford University
CA 94305, U.S.

Tel: 01-609-528-4962

M.S.

Institute of Microelectronics,
Peking University