Wednesday, August 11, 2010

Status of new RTPs and ALD

Hello All,
    Just a quick update to let everyone know the current status of new tools in the lab. Good news, the RTPs have been signed off by all of the county regulatory agencies and are ours to continue startup. It is now up to Ed and Jim H to have Allwin( the vendor) come in and perform startup and their qual. Contact Ed for training.
    Not such great news for the FIJI ALD we are still discussing several issues with county fire officials-other depts are OK. Unsure as to time of resolution.
    Intel vac sputter and ebeam tools will be here soon and hopefully plans will not be too delayed.
    One of the plasma dep tools is already here and we are working on plan submittal. Hopefully disruptions will be kept to a minimum as these tools are installed.
    Once again thank you for your patience and cooperation as these plans move forward.  Ted

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