The lab is now open again after this morning's power outage. The cause
appears to have been a short caused during building repair and
maintenance of a compressor. The Buildings & Ground Maintenance group
immediately sent out electricians to assess and repair the problem.
Greenlighted tools should be OK to use. Tools that are in shutdown or
enabled by staff are in the process of being checked out. Please check
with the responsible staff member about the status of any tool if there
are any uncertainties. And please do report any problems you observe,
as power glitches can result in less-than-obvious issues.
Lastly, if you have equipment enabled during this time, contact staff
about adjusting your enable times. If you have wafers in process and
can't yet retrieve them, contact any staff with instructions on what to
do with them.
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
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