TiN wet etch?

Dear SNF lab members,

I'm trying to etch Al+TiN layer in my metal contact process, and I know that Al can be removed by the Aluminum etchant without affecting the photoresist. Is there wet etchant that can etch TiN without doing damage to the photoresist areas?

Or do I have to resort to dry-etching?

Thanks,

Wooshik Jung