Wednesday, April 29, 2009

Comment p5000etch SNF 2009-04-29 21:20:15: Heat exchanger problem

I turned on the heat exhchanger so Renshen can process his
sample. Still a problem with heat exchanger shutting off, what I
also noticed both chill valve for wall and cathode (cha a) are not
working. The wall chill valve is always on and the cathode chill
valve will not open. still troubleshooting...

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