Hello All,
As part of the effort to continually improve the. lab, LTO/BPSG will
be giong down in approximately 3 weeks for a gas jungle retrofit. This
will bring the gas delivery system close to current technology. It will
also make the system more maintainable. At this point the furnace will
be down for approximately 3 weeks ( for retrofit as well as process
qual/characterization). Please try and complete any work that needs
this tool by this time. If you have any serious conflicts please advise
one of the staff ASAP. Thanks for your cooperation in advance. Ted
Tuesday, July 1, 2008
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