Thursday, February 14, 2008
Re: Shutdown p5000etch SNF 2008-02-13 20:55:36: Unloading and PC connection errors
Unloading wafer problem was caused by the vent pressure being too low. The endpoint pc error I believe was caused by the user failing to press F2 a second time to get into the process mode. Ran 3 wafers through chamber C using the user's recipe with no problems.
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