Problem p5000etch SNF 2008-02-21 17:42:06: Robot Extension Position Unknown

The robot extension position is unknown and will not move the wafer out of Chamber B. There should be a wafer on the arm, but not sure. If you mange to get it out, it was just a test wafer, so you can toss it. Also, we know it's upside down... we were trying to strip nitride off the back of the wafer.