Re: Shutdown p5000etch SNF 2008-01-29 14:42:51: Robot extension problem

Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 68 wafers cycled through Ch.C. Ran "Ch.C Hanjun" recipe to verify chamber operations.