Wednesday, January 30, 2008
Comment p5000etch SNF 2008-01-30 12:37:49: Update
Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 20 wafers cycled through Ch.C. Will cycle wafers until 3 pm. Will release system if no other faults.
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