Comment p5000etch SNF 2007-12-11 16:29:11: Ch.A metal etch worked, but finicky

I ran some test wafers and two device wafers thru Chamber A (metal timed etch). Worked, but machine was finicky and required frequent intervention by Cesar to maintain correct servo pressure. Also, Ch. A recipes wouldn't communicate with endpt PC so we had to use fixed-time etch (i.e. 'no endpoint') option on all steps.