Problem p5000etch SNF 2007-12-15 01:00:55: ChB down

When I was about to load my wafers we all heard a loud blast from p5000 followed by a smell of burnt bakelite. Ericp was there and he concluded after some inspection that the problem was possibly related to some electrical circuit/cable and put chamber B offline. Ch A and Ch C seems to work fine. I used Ch C after that without any problem.