Thursday, October 11, 2012

Comment p5000etch SNF 2012-10-11 21:31:46: Update

Adjusted wafer chamber drop and pick up, we have a intermittent
problem during wafer pick up from chamber C its losing the step
count during robot re-trac to back or zero position , will leave cha C
offline for now and continue to troubleshoot the intermittent problem.
The slit door is working fine and robot is not hanging up when slit
door opened...

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