Sorry to spam. I am doing a KOH etch from the backside of the wafer. But my front side of wafer has Al, which can't survive in a long time KOH etch. I am wondering if anyone have proTEK (http://www.brewerscience.com/products/protective-coatings) or have used the proTEK before to protect the frontside of the wafer? Any comments and suggestions are welcomed.
Best,
Helen
Qiushi(Helen) Ran
------------------------------------------------------------------------------
Cell: 650-796-1439
Ph.D. Candidate
Department of Electrical Engineering,
Stanford, CA, 94305
Department of Electrical Engineering,
Stanford, CA, 94305
No comments:
Post a Comment