Re: Wet etching TiW?

I used to etch off pallets coated with TiW and Au with heated H2O2 at
40 degrees C followed by Au Anodic etch.
This was on a SLOAN sputter tool.

JWC

On Oct 4, 2011, at 5:35 AM, Suyog Gupta <suyog@stanford.edu> wrote:

> Dear Labmembers,
>
> I was wondering if anybody has tried wet etching TiW? I have about
> 100nm of TiW on Al2O3 that I need to wet etch.
> H2O2 seems to work but the etch rate at room temperature turned out
> to be too slow ~ 3 nm/min. If you have any suggestions, please let
> me know!
>
> Thanks,
> Suyog