Wednesday, October 6, 2010

Comment p5000etch SNF 2010-10-06 14:36:25: End point Ch. A

On 10/5 (yesterday), I ran 8 wafers trhough Ch. A using end point. The endpoint was achieved as per the trace but the step did not end at endpoint and continued to the maximum set time in the step. Is there a problem in the communication between end point computer to Chamber A?

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