Raith during normal SEM operations, and all of our other SEM's images
as well, it should not be evident during any Ebeam Lithography writes
due to the very short dwell times when the system unblanks and is
actually performing an exposure operation.
If anyone observes any artifact that could be attributed to these
vibrations, please send me an SEM image and report and claim a free
lunch from me!
Thank you,
James Conway
On Sep 13, 2010, at 9:32 AM, John Shott <shott@stanford.edu> wrote:
> SNF Lab Members:
>
> As many of you have learned, there is significant jack hammering
> activity on Via Pueblo this morning. We were supposed to receive
> advance warning of when this would occur and did not. We are
> working with Stanford Project Management and McGuire & Hestor to try
> to get better warning information in the future.
>
> This activity may disrupt operations of the Raith, SEMs and high-
> resolution optical lithography.
>
> We apologize for this inconvenience and will hope to get more
> advance warning of activities of this type in the future.
>
> John
>
>
>
>
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