Re: Pd etchant?

I don't think there are any restrictions on Pd in the SNF cleanroom
other than it would be in the Au contaminated equipment group.

We use Pd coatings for charge compensation and to improve contrast in
SEM imaging

Best

James Conway
Ebeam lab at SNF

On Apr 7, 2010, at 12:15 PM, Betty Young <bayoung@stanford.edu> wrote:

> My understanding is that Pd is not allowed in lab - I had to do all
> Pd work off-campus.
> Perhaps that has changed....
>
> Betty
> ----- Original Message -----
> From: "Kyunghoae Koo" <koo1028@stanford.edu>
> To: labmembers@snf.stanford.edu
> Sent: Wednesday, April 7, 2010 11:45:25 AM GMT -08:00 US/Canada
> Pacific
> Subject: Pd etchant?
>
>
>
>
> Hi All,
>
>
>
> Any Pd wet etchant is available in SNF? Should I go with a dry
> etching?
>
> Thanks
>
>
>
> Kyunghoae
>
>
>
>
>
> ===========================================================
>
> Kyung-Hoae Koo
>
> PhD candidate
>
> Stanford University
>
> EE department
>
>