Monday, November 30, 2009

Re: Shutdown p5000etch SNF 2009-11-29 22:21:42: Heat exchanger problem

Wall heat exchanger (amat 0) is OK. Problem is with CH.A heat exchanger. Need to replace Ch.A heat ex pump. Ch.B and C are OK. Ran 4 wafers through each chamber with no problem.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)