PhD defense- Kuan-Lin Chen, Wednesday 2pm, September 30, Mechanical Eng. Research Lab

Department of Mechanical Engineering
University PhD Dissertation Defense

Title: Wafer level thin-film encapsulation for RF MEMS resonators and filters.

Advisor: Prof. Thomas W. Kenny, Prof. Roger T. Howe

Time:  September 30, 2009, 2:00 pm (Refreshment served at 1:45pm)

Location: Mechanical Engineering Research Lab (MERL), Conference room (2nd floor, by the kitchen area) 

Campus map: http://campus-map.stanford.edu/index.cfm?ID=02-660

Abstract:
RF MEMS devices are becoming an promising alternatives for components in radio systems due to its high-Q, size, and on-chip compatibility. However, packaging for RF MEMS devices still remains a big challenge for commercialization. Using epitaxial silicon thin-film to encapsulate MEMS devices has been shown as a robust packaging technology, however the frequencies of devices were not yet in the radio frequency ranges. This talk will first evaluate the signal characteristics of silicon packaging followed by the presentation of two innovative packaging methods optimized for RF resonators and filters. The performances and models of resonators and filters packaged using these methods will also be presented.

Best,

Kuan-Lin Chen