Wednesday, May 13, 2009
Re: Problem p5000etch SNF 2009-05-13 00:39:20: ChB pressure error
Ran 4 wafers using the Jim_Ox recipe with no problems. Noticed that from the error log that the over pressure error ( 250 mT set , 270 mt actual) occured at step 2. The rf first turns on during this step. Perhaps the user's wafer was out gassing which added an extra gas load.
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