Problem p5000etch SNF 2008-11-28 11:16:50: RF forward power error in ch. C

Used Jim DP TRCH. The RF power in BT step couldn't reach 400W but 365W and alarmed 7 seconds into etch. Used 'end etch step' to skip rest of the BT etch. Main etch okay but RF power slightly below setpoint. 338W/350W