Shutdown p5000etch SNF 2010-09-28 23:06:39: MIA wafer inside elevator or ChB

one wafer lost inside during unload from elevator to cassette. "warning - sensed by vacuum on pick up from storage elevator". wafer cannot be seen inside elevator from the top viewports. since there was no error when unloading from process chamber to elevator, wafer should not be in ChB. please put wafer in holder provided.