Tuesday, September 14, 2010
Comment p5000etch SNF 2010-09-14 11:01:21: ChA Foreline
Just to document: ChA foreline may have been contaminated by the glycol leak, as Cesar found it difficult to reach base pressure when disconnected from the chamber. This will have to be taken apart and properly cleaned up at some point. In the meantime, to facilitate bringing up ChA when parts arrive, the ChD foreline is now hooked up to ChA pump and foreline input using flexline.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment