Comment p5000etch SNF 2010-09-22 06:42:55: ChA Update

Cesar reassembled the chamber yesterday, but found a leak in the helium valve. He rebuilt the valve and reinstalled -- the vacuum and rate of rise look excellent. The process kit needs to be reinstalled and O2 and Ar plasma to remove organics from the glycol leak/IPA cleanup. Hope are the system will be ready for etch qual later today. (Elmer was right on the timeline!)