Comment p5000etch SNF 2010-09-16 14:11:47: ChA Update

The new base cathode and helium feedthrough finally arrived late yesterday morning. Cesar began reassembling the system yesterday, but had to obtain a replacement flag for the wafer lifter sensor. He finished up this afternoon. The system is pumping out now, with coolant lines off. Tomorrow, coolant will be turned on and the system will be checked out for vacuum integrity. After basic operational testing and qual, IF all is well, we hope it will be available for general use by the end of the day.