Friday, September 24, 2010

Comment p5000etch SNF 2010-09-24 14:18:50: Qual for CH A

CH A METAL recipe used
Al ER = 7482A/min
PR ER = 3951A/min
Th Ox ER = 897A/min
Single Crystal Si ER = 3988A/min
Sel Al : PR = 1.9 : 1
Sel Al : Ox = 8.4 : 1
Sel Al : Si = 1.9 : 1
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