Tuesday, September 7, 2010

Comment p5000etch SNF 2010-09-07 11:18:28: Update: Chamber A

Using external tc vacuum gauge, checked dry pump only and
it base out below 30mt. Disconnect vacuum foreline behind the
tool and connect external tc vacuum gauge and forline only pump
down to 190mt base pressure, will have to pull the foreline down
and clean and vacuum leak check..

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