Thursday, December 3, 2009

Shutdown p5000etch SNF 2009-12-03 16:36:37: Wafer did not drop on blade from Ch B

After processing one of two wafers, the tool was not able to retrieve the wafer fro m chamber B.
@Elmer: There is a box and tweezers standing on the desk at P5000. Could you load the two wafers into that box.
Thanks,
Frank

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