Wafer cycling (200 sec etch) failed after 7 wafer. Placed the ch.B online and disabled the cap sensors again. The cap sensors need to be recalibrated before they are fully operational.
I will leave the system under Problem but please watch your wafers as they enter and exit the process chambers especially Ch.B. If you see a loading problem that might endanger your wafer, press STOP and all wafer movement will stop.
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