Wafer was recovered by another user.
Ran 32 wafers with the "declamp" plasma step before the final pump step with no problems. He leak rate was ~ 1.5 sccm for all wafers.
Lowered the power of the declamp step to 50 W from 150 W and will continue to cycle wafers.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment