Has anybody etched Ti in drytek1 or 4? In Wiki, it says drytek1 or 4 can be used for Ti etching. But it doesn't specify about gas and etch rate. My samples are gold contaminated so I can't use p5000. If there are any tool for Au contaminated Ti etching rather than drytek, please let me know. Thank you in advance.
Kyunghoae
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