Monday, February 22, 2010

Comment p5000etch SNF 2010-02-22 10:51:09: ran 3 wafers in Ch. B with no problems

first two were test wafers, no resist, running Jim-Ox. Last was a prime wafer with resist. Gas flows looked good and wafers were ejected without any errors.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)