Friday, February 26, 2010

Comment p5000etch SNF 2010-02-26 15:27:32: Ch B handling- Yea!

I ran 15 wafers using CH B Oxide without and handling problems. I did have a very short 5 sec Ar step (not sure it did anything, but it was in the program) and the main etch was 55 secs.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)