Ran tests to see the effect of ChC chiller temperature on poly etch rates and nonuniformity.
Chiller at 24C: ER = 3203 A/min, nonuniformity = 4.1%
Chiller at 40C: ER = 3191 A/min, nonuniformity = 3.8%
Chiller temperature does not seem to have a significant effect on poly etch uniformity. These values are consistent with the recent history of this chamber.
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