"Ch. B pressure fault - is 271mT, setpoint 250mT"
ressumed run, observed pressure fluctuations in chamber from 200mT up to 295mT. Then
"MFC2 high flow fault, setpoint=15, actual=18"
this is for CHF3 flow. Stopped run and followed recover from stop procedures in instruction manual. Currently the seal between the elevator chamber and the cassette chamber is open. I was running Jim-ox process for 118sec.
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