Wednesday, September 17, 2008

SiON deposition at SNF

Dear lab members,

 

 Is there a tool for SiON deposition at SNF? I am hoping to deposit 10-100nm thick SiON on top of LPCVD SiO2.

 

Thanks,

SangBum

Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)