As you may be aware, last Friday we experienced a period of process
chilled water and compressed air failure that was caused by a failure of
one of the electrical panels. We need to shutdown that panel and the
one upstream of it so that the proper circuit breakers can be safely
replaced. The power is scheduled to go off tomorrow (Thursday) morning
at 8 a.m. and should be out for a maximum of 3 hours. We will begin to
power down affected equipment at 6 a.m.
This will likely affect about 25% of the equipment in the lab and will
include:
1. The tools in the little characterization area off the gowning room.
2. The tools along the aisle closest to the gowning room (Rudolph
ellipsometer and other characterization tools.
3. The tools along the aisle with wbgen and sts dep including ALD and
metalica.
4. The tools along the aisle with ASM epi (including the ASM epi burnbox
and scrubber) and stsetch2.
5. AG4100 and AG4108.
6. Innotec.
7. Hitachi Ebeam. We will also be checking whether this will affect any
of the Raith or the sem4160.
Note: This outage will also affect all of the equipment in CIS 152 ....
the private test room where the Cascade probe station, the cryostation,
and a lot of test and circuit work is done.
Note: any tools with cryopumps (ebeam, innotec, metalica and maybe
others) will need a full cryo regen before they are back in operation so
those tools are likely to be down for the full day. Other tools will
likely be operational in the early afternoon.
We apologize for this inconvenience but really can't defer this repair
for long.
Let me know if you have any questions or concerns,
John
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