Comment p5000etch SNF 2008-09-15 15:14:16: Ch.A update

First wafer ran (Ch.A metal recipe)after the reset was OK with a He leak rate of ~ 1.5 sccm. Subsequent wafers had a leak rate of ~ 6 mT and burnt the resist (no burn marks on the backside of the wafer). It looks like one of the lip seals is bad again. Kevin decided to run anyway. Need to find out what is causing the seals to fail prematurely.