Problem p5000etch SNF 2008-09-18 16:41:48: software unresponsive

Upon trying to remove my wafer, I received the error "The load chamber task did not acknowledge the sequencer". The message "Select Error Processing Option" flashes on the screen on the System page, but I am unable to abort or put the system in manual mode, or open the door. My wafer is currently in the cassette in the loading station.